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Air-bearing stage



Designed to meet the needs of demanding applications, the ABL 1500 Series is a linear motor-driven air-bearing stage for high-performance scanning and inspection applications. The air bearing has an inherent averaging effect that is said to maximize performance while the thin film will fill small surface voids and allow for other irregularities. This characteristic reportedly yields superior pitch, roll, yaw, straightness and flatness specifications. The ABL 1500 Series incorporates an active preload on both the vertical and horizontal surfaces and the opposing thin-film pressure maintains the bearing nominal gap tolerance. Linear encoder feedback provides sub-nanometer resolution.

Aerotech, Inc., 412/963-7470.

[email protected]

Booth S-5561

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