The Sputter Process Monitor SPM 220 and High Pres
sure Analyzer HPA 220 gas analysis systems are based on the proven mass spectrometer PrismaPlus in combination with a dry compressing HiPace turbo pumping station and are used to monitor and document vacuum processes. The SPM 220 and HPA 220 are equipped with a number of digital and analog inlets and outlets which enable their simple connection to process control systems. The newly developed operating software is distinguished with a clearly laid out user interface as well as simple documentation of measurement results. Furthermore, it is possible to modify the software for special process requirements.
Â
Pfeiffer Vacuum Inc., 603 578 6522. www.pfeiffer-vacuum.com
0 comments
Hide comments
