Gas Analysis Systems

Jack Mans, Plant Operations Editor

March 11, 2015

1 Min Read
Gas Analysis Systems

The Sputter Process Monitor SPM 220 and High Pres298163-I_Pfeiffer_jpg.jpg

I- Pfeiffer.jpg

sure Analyzer HPA 220 gas analysis systems are based on the proven mass spectrometer PrismaPlus in combination with a dry compressing HiPace turbo pumping station and are used to monitor and document vacuum processes. The SPM 220 and HPA 220 are equipped with a number of digital and analog inlets and outlets which enable their simple connection to process control systems. The newly developed operating software is distinguished with a clearly laid out user interface as well as simple documentation of measurement results. Furthermore, it is possible to modify the software for special process requirements.


Pfeiffer Vacuum Inc., 603 578 6522.

About the Author(s)

Jack Mans

Plant Operations Editor

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